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[IEEE 2016 IEEE International Conference on Recent Trends in Electronics, Information & Communication Technology (RTEICT) - Bangalore, India (2016.5.20-2016.5.21)] 2016 IEEE International Conference on Recent Trends in Electronics, Information & Communication Technology (RTEICT) - Modeling and simulation of multi coil induction heating system for semiconductor wafer processing
Nisha,, Vishwas, K, Suryanarayana, K, Acharya, RajaneeshYear:
2016
Language:
english
DOI:
10.1109/RTEICT.2016.7807890
File:
PDF, 1.85 MB
english, 2016