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Vapor deposition of molybdenum oxide using bis(ethylbenzene) molybdenum and water
Drake, Tasha L., Stair, Peter C.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4959532
Date:
September, 2016
File:
PDF, 676 KB
english, 2016