Optimization of N2/Ar gas flow ratio for the realization of...

Materials Science in Semiconductor Processing 2017 / 04 Vol. 61

Optimization of N2/Ar gas flow ratio for the realization of nitrogen-doped p-type ZnCdO thin films synthesized by RF magnetron sputtering

Song, Yanping, Sui, Yingrui, Hua, Zhong, Wu, Yanjie, Zhang, Yu, Wang, Zhanwu, Lv, Shiquan, Bin Yao,
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Volume:
61
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.01.002
Date:
April, 2017
File:
PDF, 790 KB
english, 2017
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