Mixed-mode high-power impulse magnetron sputter deposition...

Journal of Applied Physics 2016 / 04 Vol. 119; Iss. 15

Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization

Tucker, M. D., Ganesan, R., McCulloch, D. G., Partridge, J. G., Stueber, M., Ulrich, S., Bilek, M. M. M., McKenzie, D. R., Marks, N. A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4946841
Date:
April, 2016
File:
PDF, 981 KB
english, 2016
Conversion to is in progress
Conversion to is failed