A Thickness Measurement System for Metal Films Based on...

IEEE Transactions on Industrial Electronics 2017 / 5 Vol. 64; Iss. 5

A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection

Li, Wei, Ye, Yang, Zhang, Kang, Feng, Zhihua
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Volume:
64
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2017.2650861
Date:
May, 2017
File:
PDF, 1.71 MB
english, 2017
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