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Size-controllable fabrication of nano-to-microstructures on silicon surface using high-density ion etching with pulsed bias
Huang, Xian, Zhao, Danqi, Zhang, Li, Zhang, Dacheng, He, JunVolume:
9
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2014.0159
Date:
September, 2014
File:
PDF, 370 KB
english, 2014