Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 01 Vol. 33; Iss. 1
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Modeling of the switching I-V characteristics in ultrathin (5 nm) atomic layer deposited HfO 2 films using the logistic hysteron
Blasco, Julio, Jančovič, Peter, Fröhlich, Karol, Suñé, Jordi, Miranda, EnriqueVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4900599
Date:
January, 2015
File:
PDF, 2.07 MB
english, 2015