Development of a compact, fiber-coupled, six...

Review of Scientific Instruments 2016 / 06 Vol. 87; Iss. 6

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

Yu, Xiangzhi, Gillmer, Steven R., Woody, Shane C., Ellis, Jonathan D.
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Volume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4953335
Date:
June, 2016
File:
PDF, 2.23 MB
english, 2016
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