Influence of nanoparticle formation on discharge properties...

Applied Physics Letters 2016 / 02 Vol. 108; Iss. 6

Influence of nanoparticle formation on discharge properties in argon-acetylene capacitively coupled radio frequency plasmas

Wegner, Th., Hinz, A. M., Faupel, F., Strunskus, T., Kersten, H., Meichsner, J.
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Volume:
108
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4941806
Date:
February, 2016
File:
PDF, 690 KB
english, 2016
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