Distributions of hafnia and titania cores in EUV metal resists evaluated by scanning transmission electron microscopy and electron energy loss spectroscopy
Toriumi, Minoru, Sato, Yuta, Koshino, Masanori, Suenaga, Kazu, Itani, ToshiroVolume:
9
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.9.111801
Date:
November, 2016
File:
PDF, 2.90 MB
english, 2016