![](/img/cover-not-exists.png)
[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - An on-chip thermal stress evaluation method for silicon resonant accelerometer
Xia, Guoming, Shi, Qin, Qiu, Anping, Yu, Xuehao, Pei, ZhongHaiYear:
2016
Language:
english
DOI:
10.1109/icsens.2016.7808511
File:
PDF, 279 KB
english, 2016