Postdeposition annealing on RF-sputtered SrTiO3 thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 03 Vol. 35; Iss. 2

Postdeposition annealing on RF-sputtered SrTiO3 thin films

Bayrak, Türkan, Kizir, Seda, Kahveci, Enver, Bıyıklı, Necmi, Goldenberg, Eda
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4973970
Date:
March, 2017
File:
PDF, 1.96 MB
english, 2017
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