[IEEE 2016 13th International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE) - Novosibirsk, Russia (2016.10.3-2016.10.6)] 2016 13th International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE) - Method for the process control of integrated circuits production to account the influence of uncontrolled parameters

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