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Enhanced process and composition control for atomic layer deposition with lithium trimethylsilanolate
Ruud, Amund, Miikkulainen, Ville, Mizohata, Kenichiro, Fjellvåg, Helmer, Nilsen, OlaVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4972209
Date:
January, 2017
File:
PDF, 1.66 MB
english, 2017