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Fabrication of Ohmic contact on semi-insulating 4H-SiC substrate by laser thermal annealing
Cheng, Yue, Lu, Wu-yue, Wang, Tao, Chen, Zhi-zhanVolume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4953778
Date:
June, 2016
File:
PDF, 1.09 MB
english, 2016