Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
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Scatterometry for nanoimprint lithography
Zhu, Ruichao, Brueck, Steven R. J., Dawson, Noel, Busani, Tito, Joseph, Praveen, Singhal, Shrawan, Sreenivasan, S. V.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4967933
Date:
November, 2016
File:
PDF, 3.00 MB
english, 2016