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Microsystem Technologies 2017 / 1

Effects of an additional air chamber on the sensitivity of a capacitive pressure sensor

Choi, Jaehyuk, Choi, Bumkyoo
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3269-5
Date:
January, 2017
File:
PDF, 1.45 MB
english, 2017
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