Tailoring femtosecond 1.5-μm Bessel beams for manufacturing...

Scientific Reports 2017 / 1 Vol. 7

Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias

He, Fei, Yu, Junjie, Tan, Yuanxin, Chu, Wei, Zhou, Changhe, Cheng, Ya, Sugioka, Koji
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Volume:
7
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep40785
Date:
January, 2017
File:
PDF, 1.76 MB
english, 2017
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