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[IEEE 2016 Dynamics of Systems, Mechanisms and Machines (Dynamics) - Omsk, Russia (2016.11.15-2016.11.17)] 2016 Dynamics of Systems, Mechanisms and Machines (Dynamics) - Study on influence of metastable state of helium on atomic silicon concentration
Strunin, V. I., Baranova, L. V., Khudaibergenov, G. Zh.Year:
2016
Language:
english
DOI:
10.1109/Dynamics.2016.7819088
File:
PDF, 315 KB
english, 2016