[IEEE 2016 41st International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz) - Copenhagen, Denmark (2016.9.25-2016.9.30)] 2016 41st International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz) - Response properties of superconducting mid-infrared detectors with a nano-antenna

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