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[IEEE 2016 IEEE/MTT-S International Microwave Symposium (IMS) - San Francisco, CA (2016.5.22-2016.5.27)] 2016 IEEE MTT-S International Microwave Symposium (IMS) - High sensitivity, GHz operating SAW pressure sensor structures manufactured by micromachining and nano-processing of GaN/Si
Muller, A., Stavrinidis, A., Giangu, I., Stefanescu, A., Stavrinidis, G., Pantazis, A., Dinescu, A., Boldeiu, G., Konstantinidis, G.Year:
2016
Language:
english
DOI:
10.1109/mwsym.2016.7540009
File:
PDF, 403 KB
english, 2016