Enhancing the platinum atomic layer deposition infiltration...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 01 Vol. 33; Iss. 1

Enhancing the platinum atomic layer deposition infiltration depth inside anodic alumina nanoporous membrane

Vaish, Amit, Krueger, Susan, Dimitriou, Michael, Majkrzak, Charles, Vanderah, David J., Chen, Lei, Gawrisch, Klaus
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4904398
Date:
January, 2015
File:
PDF, 968 KB
english, 2015
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