Optimization of annealing temperature for high-...

Optimization of annealing temperature for high- κ -based gate oxides using differential scanning calorimetry

Biswas, Debaleen, Sinha, Anil Kumar, Chakraborty, Supratic
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4929442
Date:
September, 2015
File:
PDF, 1.20 MB
english, 2015
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