Chemical Mechanical Planarization of Microelectronic...

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Chemical Mechanical Planarization of Microelectronic Materials || Oxide CMP Processes Mechanisms and Models

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.
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Volume:
10.1002/97
Year:
1997
Language:
english
DOI:
10.1002/9783527617746.ch5
File:
PDF, 2.93 MB
english, 1997
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