Effect of driving voltages in dual capacitively coupled...

Effect of driving voltages in dual capacitively coupled radio frequency plasma: A study by nonlinear global model

Bora, B.
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Volume:
22
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4932080
Date:
October, 2015
File:
PDF, 5.10 MB
english, 2015
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