A simplified method for generating periodic nanostructures by interference lithography without the use of an anti-reflection coating
Kapon, Omree, Muallem, Merav, Palatnik, Alex, Aviv, Hagit, Tischler, Yaakov. R.Volume:
107
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4936088
Date:
November, 2015
File:
PDF, 801 KB
english, 2015