A kinetic model for stress generation in thin films grown...

Journal of Applied Physics 2016 / 04 Vol. 119; Iss. 14

A kinetic model for stress generation in thin films grown from energetic vapor fluxes

Chason, E., Karlson, M., Colin, J. J., Magnfält, D., Sarakinos, K., Abadias, G.
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Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4946039
Date:
April, 2016
File:
PDF, 625 KB
english, 2016
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