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[IEEE 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Chongqing, China (2016.7.18-2016.7.22)] 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - The study on error compensation of the probe system for nano coordinate measuring machine
Du, Cuicui, Feng, Xugang, Li, Xinguang, Zhang, JiayanYear:
2016
Language:
english
DOI:
10.1109/3M-NANO.2016.7824958
File:
PDF, 321 KB
english, 2016