[IEEE 2016 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Nagoya, Japan (2016.11.28-2016.11.30)] 2016 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Improvement of sensitivity of force sensor probe using quartz crystal resonator
Hasegawa, Noriaki, Sakuma, Shinya, Sato, Ayaka, Arai, FumihitoYear:
2016
Language:
english
DOI:
10.1109/MHS.2016.7824175
File:
PDF, 243 KB
english, 2016