Ultrahigh vacuum deposition of higher manganese silicide...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 11 Vol. 33; Iss. 6

Ultrahigh vacuum deposition of higher manganese silicide Mn 4 Si 7 thin films

Dulal, Rajendra P., Dahal, Bishnu R., Pegg, Ian L., Philip, John
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4933083
Date:
November, 2015
File:
PDF, 456 KB
english, 2015
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