Subdiffraction plasmonic lens lithography prototype in...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2017 / 01 Vol. 35; Iss. 1

Subdiffraction plasmonic lens lithography prototype in stepper mode

Liu, Minggang, Zhao, Chengwei, Luo, Yunfei, Zhao, Zeyu, Wang, Yanqin, Gao, Ping, Wang, Changtao, Luo, Xiangang
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4972521
Date:
January, 2017
File:
PDF, 3.88 MB
english, 2017
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