High-performance facility and techniques for high-precision machining of optical components by ion beams
Chkhalo, N.I., Kaskov, I.A., Malyshev, I.V., Mikhaylenko, M.S., Pestov, A.E., Polkovnikov, V.N., Salashchenko, N.N., Toropov, M.N., Zabrodin, I.G.Volume:
48
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.01.004
Date:
April, 2017
File:
PDF, 878 KB
english, 2017