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Carbon elimination from silicon kerf: Thermogravimetric analysis and mechanistic considerations
Vazquez-Pufleau, Miguel, Chadha, Tandeep S., Yablonsky, Gregory, Biswas, PratimVolume:
7
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep40535
Date:
January, 2017
File:
PDF, 1.23 MB
english, 2017