A quantitative strain analysis of a flexible single-crystalline silicon membrane
Bong, Jae Hoon, Kim, Cheolgyu, Hwang, Wan Sik, Kim, Taek-Soo, Cho, Byung JinVolume:
110
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4974078
Date:
January, 2017
File:
PDF, 987 KB
english, 2017