A quantitative strain analysis of a flexible...

A quantitative strain analysis of a flexible single-crystalline silicon membrane

Bong, Jae Hoon, Kim, Cheolgyu, Hwang, Wan Sik, Kim, Taek-Soo, Cho, Byung Jin
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Volume:
110
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4974078
Date:
January, 2017
File:
PDF, 987 KB
english, 2017
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