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A simple fabrication process for SiN x /SiO 2 waveguide based on sidewall oxidation of patterned silicon substrate
Wang, Ya’nan, Luo, Yi, Xiong, Bing, Sun, Changzheng, Wang, Jian, Hao, Zhibiao, Han, Yanjun, Wang, Lai, Li, HongtaoVolume:
64
Language:
english
Journal:
Journal of Modern Optics
DOI:
10.1080/09500340.2016.1226440
Date:
February, 2017
File:
PDF, 1.31 MB
english, 2017