Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study
Britun, Nikolay, Belosludtsev, Alexandr, Silva, Tiago, Snyders, RonyVolume:
50
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa560c
Date:
February, 2017
File:
PDF, 2.95 MB
english, 2017