A New Quality Metric for III–V/High-k MOS Gate Stacks Based on the Frequency Dispersion of Accumulation Capacitance and the CET
Vais, Abhitosh, Franco, Jacopo, Martens, Koen, Lin, Dennis, Sioncke, Sonja, Putcha, Vamsi, Nyns, Laura, Maes, Jan, Xie, Qi, Givens, Michael, Tang, Fu, Jiang, Xiaoqiang, Mocuta, Anda, Collaert, Nadine,Volume:
38
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2017.2657794
Date:
March, 2017
File:
PDF, 810 KB
english, 2017