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[IEEE 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - Xi'an, China (2016.10.21-2016.10.24)] 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - A variational beam model for MEMS driven by electrostatic and piezoelectric forces
Zhou, Ya-rong, Yang, Xu, Yin, Teng-hao, Wang, Bmg-leiYear:
2016
Language:
english
DOI:
10.1109/SPAWDA.2016.7829955
File:
PDF, 437 KB
english, 2016