A Low-Cost and High-Resolution Micromachine Tool With...

Journal of Micro and Nano-Manufacturing 2015 / 03 Vol. 3; Iss. 1

A Low-Cost and High-Resolution Micromachine Tool With Toggle-Based Mechanism

Wang, Shih-Ming, Ye, Zhe-Zhi, Yang, Chih-Peng, Yen, Chuntai
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Volume:
3
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4028878
Date:
March, 2015
File:
PDF, 2.03 MB
english, 2015
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