Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 01 Vol. 35; Iss. 1
Reliability improvements of TiN/Al 2 O 3 /TiN for linear high voltage metal–insulator–metal capacitors using an optimized thermal treatment
Lefevre, Aude, Ferreira, Delphine, Veillerot, Marc, Barnes, Jean-Paul, Parat, Guy, Czernohorsky, Malte, Lallemand, FlorentVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4972232
Date:
January, 2017
File:
PDF, 2.74 MB
english, 2017