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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method
Lukichev, Vladimir F., Rudenko, Konstantin V., Dubkov, S., Bulyarskii, S., Pavlov, A., Trifonov, A., Kitsyuk, E., Mierczynski, P., Maniecki, T., Ciesielski, R., Gavrilov, S., Gromov, D.Volume:
10224
Year:
2016
Language:
english
DOI:
10.1117/12.2267052
File:
PDF, 1013 KB
english, 2016