Study on the influence of different trench-patterned templates on the crystalline microstructure of AlN epitaxial films by X-ray microdiffraction
Khan, Dinh Thanh, Takeuchi, Shotaro, Nakamura, Yoshiaki, Nakamura, Kunihiko, Arauchi, Takuji, Miyake, Hideto, Hiramatsu, Kazumasa, Imai, Yasuhiko, Kimura, Shigeru, Sakai, AkiraVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.025502
Date:
February, 2017
File:
PDF, 932 KB
english, 2017