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Top-down fabrication of silicon-nanowire arrays for large-scale integration on a flexible substrate for achieving high-resolution neural microelectrodes
Lee, SangminVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3271-6
Date:
February, 2017
File:
PDF, 3.14 MB
english, 2017