Silicon nitride directional coupler interferometer for...

Optical Engineering 2017 / 01 Vol. 56; Iss. 1

Silicon nitride directional coupler interferometer for surface sensing

Okubo, Kyohei, Uchiyamada, Ken, Asakawa, Kiyoshi, Suzuki, Hiroaki
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Volume:
56
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.56.1.017101
Date:
January, 2017
File:
PDF, 2.80 MB
english, 2017
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