Automotive MEMS sensors based on additive technologies

Automotive MEMS sensors based on additive technologies

Vasiliev, A A, Sokolov, A V, Pisliakov, A V, Oblov, K Yu, Samotaev, N N, Kim, V P, Tkachev, S V, Gubin, S P, Potapov, G N, Kokhtina, Yu V, Nisan, A V
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Volume:
151
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/151/1/012024
Date:
October, 2016
File:
PDF, 984 KB
english, 2016
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