Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 09 Vol. 33; Iss. 5
Properties of epitaxial barium titanate thin films using a highly volatile Ba( hfa ) 2 triglyme precursor
Jeong, Young Kyu, Wessels, Bruce W.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4927380
Date:
September, 2015
File:
PDF, 3.33 MB
english, 2015