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AIP Conference Proceedings [AIP NEW TREND IN APPLIED PLASMA SCIENCE AND TECHNOLOGY: The Seventh International Symposium on Applied Plasma Science - Hamburg, (Germany) (31 August–4 September 2009)] - Plasma Cleaning of Oxides from Surfaces: The State of the Art
Voitsenya, V. S., Masuzaki, S., Motojima, O., Davis, J. W., Kobayashi, Akira, Krasa, Josef, Miyasaka, TakeshiYear:
2010
Language:
english
DOI:
10.1063/1.3508574
File:
PDF, 248 KB
english, 2010