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AIP Conference Proceedings [AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: 11th International Workshop - Bad Schandau, (Germany) (12–14 April 2010)] - Investigation Of Stress-Induced Voiding Of Double Cross-Shaped Single Via Test Structure And Derivatives For Deep-Sub Micron Technology Nodes
Poppe, J., Yao, W., Aubel, O., Limbecker, P., Zschech, Ehrenfried, Ogawa, Shinichi, Ho, Paul S.Year:
2010
Language:
english
DOI:
10.1063/1.3527140
File:
PDF, 4.49 MB
english, 2010