Magnetron sputtering system for coatings deposition with...

Journal of Physics Conference Series 2015 / 11 Vol. 652

Magnetron sputtering system for coatings deposition with activation of working gas mixture by low-energy high-current electron beam

Gavrilov, N V, Kamenetskikh, A S, Men'shakov, A I, Bureyev, O A
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
652
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/652/1/012024
Date:
November, 2015
File:
PDF, 1001 KB
english, 2015
Conversion to is in progress
Conversion to is failed