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[IEEE 2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Mexico City, Mexico (2016.9.26-2016.9.30)] 2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - A set of test structures for the development of a CMOS-MEMS technology
Baez Alvarez, Carlos Ramon, Linares Aranda, Monico, Torres Jacome, Alfonso, Calleja Arriaga, Wilfrido, de la Hidalga Wade, JavierYear:
2016
Language:
english
DOI:
10.1109/iceee.2016.7751206
File:
PDF, 1.34 MB
english, 2016